Multi-Graphene Cubic Structure Fabricated By Nanomanipulation

2015 IEEE 15TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)(2015)

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摘要
Muhi-graphene cubic structure was fabricated by a nanomanipulation system. Two nanomanipulators were coordinately used with three degrees of freedoms to handle two end-effectors respectively. A cubic net was designed and fabricated using a multi graphene by a FIB (Focused Ion Beam) etching. A tungsten probe was also reformed by the FIB etching to adjust the size of cubic net design for bending manipulation. The each surface of cubic net was bent to form a cubic 3D structure. In this study, the bending stress of multi graphene were also measured using a silicon cantilever to reveal the elastic or plastic deformation regions by bending manipulation.
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关键词
Multi-graphene, Nanomanipulation, Cubic Structure, Cubic Net Design, 3D Assembly
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