Optical MEMS and nanophotonics in Samsung Electronics
mag（2013）
Abstract
We introduce recent research activities on optical MEMS (micro-electro-mechanical systems) and nanophotonics in Samsung Electronics. Several key optical devices for commercial applications such as lenses, shutters, switches, and absorbers are discussed. The developed optical MEMS devices are based on various tuning mechanisms by electro active polymer, electrostatic, and micro-electro-fluidic actuation. Also, we discuss applicability of nanophotonic components to infrared imaging applications.
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Key words
microfluidics,electrostatics,nanophotonics,optical switches,lenses
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