Yield Aware Equipment Preventive Maintenance (PM) Optimization

Anand Inani, J Kim, Miao Liao, K Shimazu, Younlong Lin, S Arthanari,Brian E Stine

2007 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE（2007）

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摘要

Typically equipment PM optimization and strategy is determined using a mix of various sources and inline inspection. In this work, the need for a more yield aware optimization strategy is recognized and recommendations made to implement this.

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关键词

production,productivity,testing,drilling,preventive maintenance,inspection,throughput

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