MOCVD of HfO 2 from Alkoxide and Alkylamide Precursors
MRS Proceedings（2011）
Abstract
The alkoxide and alkylamide complexes [Hf(mmp) 4 ] and [Hf(NMe 2 ) 4 ] 2 are both promising precursors for the MOCVD of HfO 2 . A comparison has shown that [Hf(NMe 2 ) 4 ] 2 deposits oxide at lower temperatures and over a wider temperature range then [Hf(mmp) 4 ].
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Key words
alkylamide precursors,hfo2,alkoxide
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