Catalytic Effect of Near-Noble Metals on Si Oxidation

P Lomellini,S Valeri

Dynamical Phenomena at Surfaces, Interfaces and SuperlatticesSpringer Series in Surface Sciences（1985）

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摘要

It is well known that Si oxidation is enhanced by the presence of metal atoms, even at RT (room temperature). Up to now only few results are available on the oxygen exposure and metal concentration dependence of this effect, and on the catalytic ability of different metals[1,2] .

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关键词

Oxygen Exposure, Oxygen Interaction, Relative Weight Change, Metal Auger, Silicide Surface

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