456 薄膜/基板材への押込みにおける硬さのオーバーシュート現象(切削・研削・研磨加工II,オーガナイズドセッション)
mag（2008）
Key words
indentation hardness,finite element analysis,film
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined