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Diamond-Shaped e-SiGe Optimization by TCAD Simulation to Improve P-type MOSFET Performance for 28nm Logic Technology and Beyond

B Lee, Yong Ding, Fang He,B Ye, Tao Yu,Y He, Hua Zhang, Shinshan Yu,Hong Wu, Zhaojun Pan, Xiaoxia Shi

mag(2013)

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