Embossing of Soft-magnetic Structures and Influence on Magnetic Properties

Magnetic flux guides are often a part of MEMS. These flux guides are usually made by electroplating of soft magnetic materials like NiFe. The geometry of the flux guides influences the magnetic anisotropy. A new method for the fabrication of the flux guides is the embossing of the surface to influence the magnetic anisotropy. For this purpose the Institute for micro production technology (IMPT) at the Leibniz Universitaet Hannover designed and fabricated two tools for a molding press. The embossing tool for a molding press (silicon carbide) and a bond tool are applied. This contribution describes the fabrication of the embossing tools for the molding press and the embossing process of NiFe45/55 surfaces applying the fabricated tools and the wire bond tool. The embossed surfaces are characterized via a Kerr microscope.