Experimental study on air velocity uniformity of Equipment-Fan-Filter units
PROCEEDINGS OF THE 4TH INTERNATIONAL CONFERENCE ON INFORMATION TECHNOLOGY AND MANAGEMENT INNOVATION(2015)
Abstract
This paper introduces the equipment-fan filter units (EFU) and analyzes the characteristics. Five modules samples of FFU and EFU are tested on the FFU performance test bench. Contrast shows that, there are significant variations of air velocity uniformity between the two, the central-regional velocity profiles of EFUs are worse than FFUs.
MoreTranslated text
Key words
clean room
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined