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640x480 Pixel Active-Matrix Heed Imaging Sensor With Harp Target

N. Negishi,T. Sato,Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura,Y. Okuda,A. Watanabe, T. Yoshikawa,K. Ogasawara,M. Nanba,S. Okazaki,K. Tanioka,N. Egami, N. Koshida

2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE(2007)

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Key words
image sensors,silicon wafer,current density,electron emission,low voltage,silicon,image sensor,pixel,chip
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