ギガビットDRAM用のECRプラズマCVD-(Ba, Sr)TiO_3容量膜

政次吉田,幸司有田, 久人藪田, 修次曽祢,新太郎山道, 浩一竹村, 敏幸佐久間, 芳健加藤, 洋一宮坂, 敏洋飯塚,弘山口, Lesaicherre Pierreyves, 昭三西本

mag（1996）

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