Developing Mems Dc Electric Current Sensor For End-Use Monitoring Of Dc Power Supply: Part Iii - Integration With Actuating And Sensing Elements
2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)(2013)
Abstract
A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). Recently, a MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was micro-fabricated for preliminarily examination (DTIP 2012). Different from the results of the macro-scale prototype DC sensor, impulsive piezoelectric output voltages accompanying with a gradual decrease in decay were detected when the applied DC electric current was varied from 0.5 A to 2.5 A. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was also obtained but with a higher slope compared to the result of the macro-scale hand-made prototype DC sensor. In present study however (DTIP 2013), a novel oscillating type MEMS DC current sensor was further proposed. Its applicability to constantly measure the DC current without using cord separator was preliminarily verified.
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Key words
MEMS DC current sensor,Integration,Actuating and sensing,Piezoelectric plates,Constant measurement,Two-wire electric appliances,End-use of monitoring
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