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Effect of Ion Implantation and Anneals on Fully-strained SiC and SiC:P Films using Multiple Characterization Techniques

Anita Madan,Jinghong Li,Z Ren,B F Yang,Eric C Harley,Thomas N Adam,Abhishek Dube,Ashima B Chakravarti,Teresa Pinto,Zhengmao Zhu,Rainer Loesing,Dominic J Schepis,Linda Black,J W Weijtmans,Rohit Takalkar

ECS Meeting Abstracts（2008）

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