Role of plasma activation in the kinetics of CNT growth in PECVD process
Bulletin of the American Physical Society(2009)
关键词
carbon nanotube,first principle,kinetics
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要
Bulletin of the American Physical Society(2009)