28pAM-13 Si(001)基板上3C-SiCエピタキシャル薄膜における積層欠陥発生プロセスの収差補正TEM解析(28pAM 格子欠陥・ナノ構造(金属・半導体・転位・面欠陥),領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
mag(2014)
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined