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Flip-Chip Optical Fiber Attachment To A Monolithic Optical Receiver Chip

EMERGING COMPONENTS AND TECHNOLOGIES FOR ALL-OPTICAL NETWORKS(1995)

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Abstract
We report on manufacturable, low cost scheme for precision packaging a monolithically integrated GaAs optical receiver. Silicon V-groove and flip-chip bonding technologies are used to reliably achieve the required alignment accuracy. A silicon fiber carrier, which houses the fiber in a V-groove, is flip-chip bonded on to the receiver chip. The light from the cleaved end of the fiber is reflected off the V-groove end on to the planar photodetector, with an optical coupling efficiency of 85%. The entire fiber attach process uses standard semiconductor fabrication and processing techniques, making it attractive for low cost manufacturing.
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Key words
chip,silicon,optical fiber,flip chip,semiconductor manufacturing,gallium arsenide,photodetectors,packaging,manufacturing,optical fibers
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