Highly scalable and WF-tunable Ni(Pt)Si / SiON TOSI-gate CMOS devices obtained in a CMP-less integration scheme
Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials（2006）
关键词
cmos,niptsi/sion,wf-tunable,tosi-gate,cmp-less
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要