20pm1-E3 金属基板上圧電薄膜アクチュエータを用いたミリメータスケールロボットの作製
mag(2014)
Key words
vibration,piezoelectric
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined