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High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated To Si-Wire Waveguide

Terhoe Loh,Bipin Bhola,Sengtiong Ho

2008 IEEE PHOTONICSGLOBAL@SINGAPORE (IPGC), VOLS 1 AND 2（2008）

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Abstract
Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3um-, 5um- and 8um-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3 mu m- and 5 mu m-diameter photo-detector potentially can give bandwidths better than 100GHz.
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Key words
optical waveguides,fiber optics,photodetectors,gallium arsenide,couplings
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