Novel Optical MEMS Pressure Sensor Based on Tilted Gratings

Neeharika Vellaluru,Prasant Kumar Pattnaik

Photonics（2014）

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摘要

In this paper we present design and simulation of temperature insensitive Optical MEMS Pressure Sensors using dual Tilted Waveguide Bragg Gratings and dual Tilted Long Period Gratings independently and compare Pressure sensitivity and Pressure range.

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