Experimental Quantification of the Residual Stress of Thin Membrane Materials in MEMS Devices Using Point DeflectionSofiane Soulimane,A Pouydebasque,Sebastien Bolis,Fabrice Jacquet,Claudine Bridoux,Florian Dupont,Christophe Poulain,Stephane Moreau,S Fangetmag（2014）引用 23|浏览6AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
