Integrated MEMS LCResonator withSealed Air-Suspended Structure forSingle-Chip RFLSIs K.Kuwabara', N.Sato', H.Morimural, J.Kodatel,M Nakamura,Mamoru Ugajin,Toshikazu Kamei,Kazuhisa Kudou,Kenichi Machidamag(2007)引用 23|浏览2暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要