Table Top Ultraviolet Lasers Enable New Nano-Patterning Schemes
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1AND 2(2009)
摘要
We present results with different nanopatterning techniques using table top extreme ultraviolet lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography.
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关键词
extreme ultraviolet,nanophotonics,imaging,nanolithography,resists,lasers,photolithography,holography
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