504 近赤外ピコ秒パルスレーザを用いた脆性難加工材料(ニオブ酸リチウム単結晶)への低損傷表面微細加工条件の探索(OS7-1 オーガナイズドセッション《精密/微細加工と評価》)
mag(2012)
Key words
micromachining
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