Micro-retroreflector array fabricated by the LIGA process
Proceedings of SPIE-The International Society for Optical Engineering(2010)
Abstract
We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 micrometers. The array was fabricated by X-ray lithography and the LIGA process in a 1 mm thick PMMA layer and subsequently covered with Au. The area of the array is 1 mm x 10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to use it for the implementation of a transversal filter for femto-second pulses.
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Key words
microoptics,LIGA process,femtosecond pulses
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