Method of Growing High Quality, Thick SiC Epitaxial Films by Eliminating Silicon Gas Phase Nucleation and Suppressing Parasitic DepositionTangali S Sudarshan,Haizheng Song,Tawhid Ranamag（2014）引用 23|浏览10暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
