ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENTThor Bakke,Ibrune Johansen, A Vogl,F Tyholdt, D T Wangmag(2015)Cited 23|Views17No scoreAI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined