Surface analysis with scanning probe microscopy
SPIE ProceedingsMaterials Characterization and Optical Probe Techniques A Critical Review(1997)
摘要
Scanning probe microscopy is reviewed, including some of the abilities of scanning tunneling microscopy and spectroscopy. The technology of atomic force microscopy is discussed, including tip and cantilever fabrication and preparation, as well as a variety of detection schemes to measure cantilever deflection. Several atomic force microscopy techniques, including constant force imaging, interleaved imaging, resonantly-enhanced imaging, adhesion force microscopy and friction force microscopy are also reviewed. Finally, two important applications of scanning probe microscopy, magnetic force and scanning capacitance microscopy, are discussed.
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关键词
surface analysis,atomic force microscopy,scanning capacitance microscopy,scanning probe microscopy,scanning tunneling microscopy
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