Novel Type Of Microcantielver Biosesor Resonating At The Interface Between Liquid And Air

J. Park,S. Nishida, H. Kawakatsu, H. Fujita

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)(2011)

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摘要
We developed a new type of a microcantilever biosensor resonating at the interface between air and liquid. The cantilever sensor has advantages in high signal-to-noise ratio (SNR) and high quality factor (Q-factor) for detecting bio-reactions because liquid damping acts on only one-side, and because there is no obstacle between detection, excitation lasers and the cantilever. (Fig. 1 (c)) Using the cantilever integrated with a microchannel and phase locked loop detection, we measured adsorption reaction kinetics of carboxylated microspheres in real time for three different concentrations.
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关键词
reaction kinetics,phase lock loop,biomems,real time,adsorption,cantilevers,damping,signal to noise ratio,microfabrication,phase locked loops,quality factor,microchannel,silicon,biosensors,resonant frequency,q factor
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