A Plasma Damage Mitigation Concept for SOI Technologies: Lightning Rods

Mario M. Pelella,Darin Chan,Stephan Kruegel,Kai Frohberg, Jason Rivers,Thomas Heller, Ralf Richter,Norma Rodriguez,Rich Klein, J. R. Zhou, David Eppes, Mike Leary, Stephen Hale, Date Noorlag,Larry Bullard,Peter Huebler, Stefan Schueler, Andreas Dreizner, Jim Working,Christoph Schwan,Manfred Horstmann, Bill En,Karsten Wieczorek,David Greenlaw, Thomas Heidel,Volker Heinig, John Miethke,Nick Kepler

2007 IEEE International SOI Conference（2007）

引用 1|浏览5

关键词

plasma damage mitigation concept,SOI technologies,lightning rods,plasma charging damage,walking- wounded device characteristics,microprocessors,threshold voltage shifts,leakage currents

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