Fabrication of Optical Switch Based on Nanocrystalline VO2 Thin Film with Low Phase Transition Temperature

Asia Communications and Photonics Conference 2013 (2013), paper AF2B.20（2013）

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摘要

By using surface micromachining technique, an optical switch based on nanocrystalline VO2 film with low phase transition temperature is designed and fabricated. Measured results show that the optical switch can realize its switching function.

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关键词

nanocrystalline vo2 thin film,optical switch,low phase transition temperature,thin film,phase transition

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