Biophotonic sensors on a silicon chip for Raman spectroscopy and optical coherence tomography
Proceedings of SPIE(2012)
Abstract
We review our recent results on integrating biomedical optical systems onto a silicon chip. Light collection by integrated waveguides has been investigated. Confocal light delivery and collection by a combination of two arrayed-waveguide gratings has been achieved. Using an arrayed-waveguide grating as an integrated spectrometer, Raman spectroscopy and spectral-domain optical coherence tomography have been demonstrated.
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Key words
Integrated optics,silicon oxynitride,arrayed-waveguide grating,confocal light delivery and collection,Raman spectroscopy,optical coherence tomography
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