Plasma deposition of thin filmsHongcai Zhou, Charles Sim, Andrew Glidle,C Hodson, R Kinsey,C D W Wilkinsonmag(2005)引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要