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Microbolometer Production At Indigo Systems

INFRARED TECHNOLOGY AND APPLICATIONS XXX(2004)

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Abstract
Indigo's emergence as a production source of uncooled microbolometers was reported in the SPIE proceeding in 2003. With now over a year of modest volume production history on the small-format FPAs, the details of the production experiences are reported. Progress on the mid-format arrays is discussed as are the efforts towards large-format, small pixel devices. Also discussed is the status of the production ramp that will lead to the supply of uncooled FPAs into the automotive market.
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Key words
microbolometer, MEMS, uncooled infrared detectors, FPA, vanadium oxide
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