Evaluation of magnetic field from varied permutation power transmission line at high technology nano-Fab

In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.4 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process. Through the theoretical study and numerical simulation, we predict the best permutation for mitigating EMI noise from three-phase electric power lines system without any shielding system down to 1.2 mG in 3.0 m distance from applying I = 50 A at 60 Hz with 12 series cable tray system. Followed above discussions, this study indicated different and new perspectives with before opinions of some researcher. The measured magnetic field values on the nano-Fab are in good agreement with this simulation results. These good results give more confident to apply in new building nano-Fab system. Furthermore, this innovation will cost down for EMI shielding at high technologynano-Fab especially for 40 (and below) nanometer process.