METHODS FOR PROVIDING SPACED LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS

Jozef Maria Finders,Tamara Druzhinina,Emiel Peeters, Sander Frederik Wuister, Christianus Martinus Van Heesch,Heijden Eddy Cornelis Antonius Van Der, Henri Marie Joseph Boots

mag（2015）

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