Noble gas implantation region in top silicon layer of semiconductor-on-insulator substrateAlan B Botula,William F Clark,Richard A Phelps,Bethann Rainey,Yun Shi,James A Slinkmanmag（2014）引用 23|浏览11AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
