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Design optimization of a Spindt-type field emitter array for an image sensor with HARP target

Yoshinori Honda,Masakazu Nanba,Kazunori Miyakawa,Misao Kubota,Masayoshi Nagao,Yoichiro Neo,Hidenori Mimura,Norifumi Egami

2015 28th International Vacuum Nanoelectronics Conference (IVNC)（2015）

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Abstract
The electrostatic-focusing Spindt-type field emitter array (FEA) pitch was optimized for an FEA-high-gain avalanche rushing amorphous photoconductor (HARP) image sensor. Simulation results showed that a narrow FEA pitch of less than 2.2 μm deteriorates the electrostatic focusing effect.
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Key words
field emitter array,electrostatic focusing,image sensor,high-gain avalanche rushing amorphous photoconductor
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