Combining Embedded and Overlayer Compressive Stressors in Advanced SOI CMOS Technologies

Andy Wei,Thorsten Kammler, J Hontschel, H Bierstedt, Jenspeter Biethan, A Hellmich,Klaus Hempel, J Klais, G Koerner,Markus Lenski,Tilo Mantei, A Neu, R Otterbach, Christian Reichel,Bernhard Trui,Gert Burbach,Th Feudel, Peter Javorka,Christoph Schwan, N Kepler,H J Engelmann, C Ziemerpopp,Otthein Herzog, D Greenlaw,M Raab,R Stephan,Mirko Horstmann, P O Hansoon, A V Samoilov, Errol Sanchez, O Luckner, S Weihertelford

Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials（2005）

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advanced soi cmos technologies,overlayer compressive stressors

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