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Three dimensional boron distribution in heavily doped silicon epilayers resolved by atom probe tomography

K Hoummada,F Dahlem,T Kociniewski,J Boulmer, Charles Dubois,G Prudon,Etienne Bustarret,Herve Courtois,Dominique Debarre,D Mangelinck

mag（2011）

Cited 23|Views5
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Key words
atom probe tomography,three dimensional,materials science
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