Observation of Over-Layer Deposition on HgCdTe Epilayers Grown by Vertical dipping Liquid Phase Epitaxy

Environmental Science and Engineering(2014)

Cited 22|Views2
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Abstract
The HRXRD and FTIR characterization of HgCdTe epilayers grown by vertical Dipping Liquid Phase Epitaxy was analyzed to indicate the presence of < 2 JIM low-x HgCdTe over layer. A higher angle shoulder in HRXRD rocking curve and a graded cut-on as well as a double fringe pattern in FTIR was observed. Removal of --2nm surface layer by chemical etching improved the FTIR and HRXRD curves.
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Key words
HgCdTe,HRXRD,FWHM,FTIR,Chemical Polishing,Surface Damage
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