Observation of Over-Layer Deposition on HgCdTe Epilayers Grown by Vertical dipping Liquid Phase Epitaxy
Environmental Science and Engineering(2014)
Abstract
The HRXRD and FTIR characterization of HgCdTe epilayers grown by vertical Dipping Liquid Phase Epitaxy was analyzed to indicate the presence of < 2 JIM low-x HgCdTe over layer. A higher angle shoulder in HRXRD rocking curve and a graded cut-on as well as a double fringe pattern in FTIR was observed. Removal of --2nm surface layer by chemical etching improved the FTIR and HRXRD curves.
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Key words
HgCdTe,HRXRD,FWHM,FTIR,Chemical Polishing,Surface Damage
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