P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage

Kouji Kosaka,Yoshiya Egashira,Tetsuya Iwabuchi, S Okudera,Keiichi Nagamoto,Harada Takashi,Taishi Endo,Hiroyuki Hashiguti,Yasuhiro Morizono,Akira Nakada,Hiroshi Kubota,Tadahiro Ohmi

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment IIP/ISPS joint MIPE（2003）

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摘要

12-inch fine ceramic XY-stage driven by a NRUSM (non-resonance type ultrasonic motor), focused for LSI manufacturing devices, has achieved maximum velocity of 140 mm/s over the stroke of 300 mm, with 0.6 nm positioning accuracy. We report the results of the endurance test, 200km continuous driving, which was achieved by reciprocating the stage, under servo control operation.

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关键词

motor,non-resonance,ultra-sonic,xy-stage

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