The Scanning Electron Microscope As An Accelerator For The Undergraduate Advanced Physics Laboratory

Randolph S Peterson,Karl K Berggren,Mark K Mondol

AIP Conference Proceedings(2011)

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摘要
Few universities or colleges have an accelerator for use with advanced physics laboratories, but many of these institutions have a scanning electron microscope (SEM) on site, often in the biology department. As an accelerator for the undergraduate, advanced physics laboratory, the SEM is an excellent substitute for an ion accelerator. Although there are no nuclear physics experiments that can be performed with a typical 30 kV SEM, there is an opportunity for experimental work on accelerator physics, atomic physics, electron-solid interactions, and the basics of modern e-beam lithography.
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关键词
SEM,secondary electron,x-ray emission,lithography,beam optics
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