The Developmental Long Trace Profiler (DLTP) Optimized for Metrology of Side-Facing Optics at the ALS
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2014）
关键词
Surface Metrology,long trace profiler,surface slope measurement,x-ray optics,large measurement range,accuracy,stability,nanoradian repeatability,synchrotron radiation
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