Magnetron plasma processing apparatus and processing method

Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami,Keiji Horioka,Isahiro Hasegawa,Haruo Okano, Katsuya Okumura,Yukimasa Yoshida

mag（1999）

Cited 51|Views1

No score

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined