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Enhancement/Depletion-Mode Algan/Gan Hemts Demonstration Using Partial P-Type Gan Gate Etching Process

PROCEEDINGS OF THE 2015 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC)(2015)

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Key words
enhancement mode HEMT,depletion mode HEMT,p-type GaN gate etching process,GaN HEMT,semiconductor procedure,pulse measurement,voltage 0.8 V,AlGaN-GaN,Mg-GaN
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