Pzt Micromirror With Integrated Piezoresistive Position Sensors

2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)（2012）

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摘要

PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.

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关键词

MEMS,mirror,micromirror,piezoelectric,PZT

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