Performance of beam energy sampling gratings fabricated with E-Beam direct writing

Yongkang Guo,Fuhua Gao,Feng Jing,Chi Ma,Xiaofeng Wei,Jingqin Su

Diffractive Optics and Micro-Optics (2002), paper DTuD11（2002）

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摘要

In this paper, a method to fabricate beam energy sampling grating is presented. We also fabricated the sample of the gratings and corresponding experiment was carried out, the results agreed with what we designed well.

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关键词

beam energy sampling gratings,e-beam

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