Ion Sources for Deep and Shallow Ion Implantation
Ady Hershcovitch,V A Batalin,A S Bugaev,V I Gushenets,B M Johnson,A A Kolomiets,G N Kropachev,R P Kuibeda,T V Kulevoy,I V Litovko,E S Masunov,E M Oks,V I Pershin,S V Petrenko,S M Polozov,H J Poole, I Rudskoy,D N Seleznev,P A Storozhenko,A Ya Svarovski,George Yu Yushkov mag(2008)
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ion implantation,steady state,program design
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