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Fabrication of a Miniature Fiber-optic EFPI Pressure Sensor

Yana Shang,Tingyun Wang,Shupeng Liu,Qiang Guo,Zhenyi Chen,Na Chen, Zhenzhen Li

Asia Communications and Photonics Conference 2013 (2013), paper AF2I.6（2013）

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Abstract
A miniature(Φ300μm) fiber optic EFPI pressure sensor using SU-8 photoresist is fabricated. Both pressure and temperature characteristics have been studied, and it shows a good linearity within 100~700Pa with a sensitivity of 0.765nm/kPa.
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Key words
efpi pressure sensor,fiber-optic
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